Room temperature growth of crystalline Mn-Zn ferrite thin films by laser ablation technique

被引:5
作者
Nakano, M [1 ]
Song, JM
Fukunaga, H
Matsuo, Y
机构
[1] Nagasaki Univ, Dept Elect & Elect Engn, Nagasaki 8528521, Japan
[2] FDK Corp, Shizuoka 4310495, Japan
关键词
coercive force; laser ablation technique; MnZn ferrite thin films; spinel structure;
D O I
10.1109/20.908630
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A laser ablation technique contained with a shadow mask in Ar atmosphere enables us to obtain crystalline ferrite thin films on glass substrates at room temperature. Investigations on the Ar pressure, P-Ar, and the distance between the shadow mask from the target, L-1, were carried out, The optimum conditions for forming the spinel structure of R Zn-Zn ferrite were P-Ar = 20 mTorr and L-1 = 20 mm, respectively.
引用
收藏
页码:2927 / 2929
页数:3
相关论文
共 2 条
[1]   Room-temperature epitaxial growth of Ni-Zn ferrite thin films by pulsed laser deposition in high vacuum [J].
Kiyomura, T ;
Gomi, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1997, 36 (8A) :L1000-L1002
[2]   Superior magnetic properties of Mn-Zn ferrite thin films prepared by low-temperature process using laser ablation technique [J].
Nakano, M ;
Tomohara, K ;
Song, JM ;
Fukunaga, H ;
Matsuo, Y .
IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (05) :3007-3009