Design studies on piezoresistive humidity sensors

被引：41

作者：

Buchhold, R ^{[1
]}

Nakladal, A

Gerlach, G

Neumann, P

机构：

[1] Dresden Univ Technol, Inst Solid State Elect, D-01062 Dresden, Germany

[2] Dresden Univ Technol, Inst Math Stochast, D-01062 Dresden, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1998年 / 53卷 / 1-2期

关键词：

piezoresistive sensors; humidity; FEM; design;

D O I：

10.1016/S0925-4005(98)00297-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The present paper summarizes a detailed design study of a novel piezoresistive humidity sensor, the operation of which relies on the humidity-induced swelling of thin polyimide layers. The purpose of this study was to gain a better understanding of the general metrological behavior of the sensors, with a systematic optimization of the device structure in mind. The design study is based on newly developed analytical models for the offset and full-scale output parameters of the sensor. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：1 / 7

页数：7

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