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Formation of planar optical waveguides in potassium titanyl phosphate by double implantation of protons
被引:31
作者:
Bindner, P
Boudrioua, A
Loulergue, JC
Moretti, P
机构:
[1] Univ Metz, Ctr Lorrain Opt & Electron Solides, Lab Mat Opt Photon & Syst, F-57070 Metz, France
[2] Supelec, F-57070 Metz, France
[3] Univ Lyon 1, Lab Physicochim mat Luminescents, CNRS, UMR 5620, F-69622 Villeurbanne, France
关键词:
D O I:
10.1063/1.1345796
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
The formation of planar waveguides in potassium titanyl phosphate by H+ ions implantation at low energy is presented and discussed. The energy and dose were (600+550) keV and (1+0.8)x10(16) ions cm(-2), respectively. The optogeometrical parameters deduced from the optical characterization are the following: -3% for each refractive index variation (n(x), n(y), and n(z)) and a guide thickness of 4.3 mum. A good agreement is found between the value given by the top of the nuclear damages profile obtained by transport of ions in matter code and the value given by the index fall position. Losses measured in nonannealed samples were estimated to be less than 5 dB cm(-1). (C) 2001 American Institute of Physics.
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页码:2558 / 2560
页数:3
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