Electrical and optical emission characteristics of radio-frequency-driven hollow slot microplasmas operating in open air

被引:22
作者
Yalin, AP [1 ]
Yu, ZQ
Stan, O
Hoshimiya, K
Rahman, A
Surla, VK
Collins, GJ
机构
[1] Colorado State Univ, Dept Mech Engn, Ft Collins, CO 80523 USA
[2] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA
关键词
D O I
10.1063/1.1616654
中图分类号
O59 [应用物理学];
学科分类号
摘要
We employ hollow slot electrodes, with p(d) values of similar to10 Torr cm and average E/N values of similar to70 Td, to create plasmas in open air. We measure the 13.56 MHz I-rf-V-rf electrical characteristics of the plasma. Stable discharges, with sinusoidal currents, are obtained up to power densities of 14 kW/cm(3), and root-mean-square radio-frequency (rf) currents of 1.5 A/cm of slot length, before nonsinusoidal currents and rf glow-to-arc transitions occur. We report the absolute optical emission in the vacuum ultraviolet region located between 110 and 155 nm, with a focus on the 149 nm atomic nitrogen line. For this atomic N line alone, we find an emitter efficiency of 0.0024. (C) 2003 American Institute of Physics.
引用
收藏
页码:2766 / 2768
页数:3
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