Ca-doped ZrO2 thin films deposited by using the spin-coating pyrolysis process with a metal naphthenate precursor

Chemical-solution-derived Ca-doped zirconia thin films were prepared by using calcium and zirconium naphthenates. As-deposited films (Zr : Ca = 91 : 9 in molar ratio) were pyrolyzed at 500 degreesC for 10 min in air. Final annealing was done at 1000 degreesC for I h in air (flow rate: 150 similar to 200 mL/min). The crystallinity of the ZrO2-CaO thin film after annealing was measured using X-ray diffraction. A field emission-scanning electron microscope and an atomic force microscope were used to examine the surface properties of the film. The chemical structure was evaluated using a Fourier transform infrared spectroscope. The films consisted of tetragonal and monoclinic phases after annealing at 1000 degreesC. With increasing annealing temperature, the film surfaces became rougher.