Hydrogen induced Si surface segregation on Ge-covered Si(001)

被引:60
作者
Rudkevich, E [1 ]
Liu, F [1 ]
Savage, DE [1 ]
Kuech, TF [1 ]
McCaughan, L [1 ]
Lagally, MG [1 ]
机构
[1] Univ Wisconsin, Madison, WI 53706 USA
关键词
D O I
10.1103/PhysRevLett.81.3467
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Using Fourier transform infrared-attenuated total reflectance spectroscopy in conjunction with hydrogen adsorption to probe surface layer composition, we observe a reversible place exchange between Ge and Si on Ge-covered Si(001) when the surface is dosed with atomic H at elevated temperatures. First-principles calculations confirm a thermodynamic driving force for this place exchange. To explain the intriguing kinetics of the place exchange, which shows no time dependence, we propose a dimer-vacancy diffusion-assisted mechanism limited by vacancy interactions. [S0031-9007(98)07429-8].
引用
收藏
页码:3467 / 3470
页数:4
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