Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

被引：4

作者：

Kleijhorst, RA

Offerhaus, HL

Bant, P

机构：

[1] NCLR BV, NL-7500 CR Enschede, Netherlands

[2] ILT BV, NL-7547 TG Enschede, Netherlands

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1998年 / 69卷 / 05期

关键词：

D O I：

10.1063/1.1148908

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser. (C) 1998 American Institute of Physics.

引用

页码：2118 / 2119

页数：2