We developed a new low loss high destruction immunity 600V 200A trench IGBT for hybrid vehicles. In order to secure high destruction immunity at high current density use caused by chip shrink, we designed a process and a cell on the basis of results of both simulation and 2.5mm square TEGs (Test Element Groups) experimental results. A 4 mum trench pitch, punch-through wafer structure, and local lifetime technology are employed. As a result, the developed IGBT shows an on-state voltage drop of 1.55V, a fall time of 800ns, an avalanche capability of over IJ(at R.T.), and a short circuit immunity of over 40us. The IGBT is fitted with both a temperature sensor and a current sensor in order to avoid chip failure.