Scanning thermal imaging of microelectronic circuits with a fluorescent nanoprobe

被引:163
作者
Aigouy, L
Tessier, G
Mortier, M
Charlot, B
机构
[1] Ecole Super Phys & Chim Ind Ville Paris, CNRS, UPR A0005, Lab Spect Lumiere Polarisee, F-75231 Paris, France
[2] Ecole Super Phys & Chim Ind Ville Paris, CNRS, UMR 7574, Lab Chim Appl Etat Solide, F-75231 Paris, France
[3] TIMA, F-38031 Grenoble, France
关键词
D O I
10.1063/1.2123384
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have developed a scanning thermal imaging method that uses a fluorescent particle as a temperature sensor. The particle, which contains rare-earth ions, is glued at the end of an atomic force microscope tip and allows the determination of the temperature of its surrounding medium. The measurement is performed by comparing the relative integrated intensity of two fluorescence lines that have a well-defined temperature dependence. As an example of application, we show the temperature map on an operating complementary metal-oxide-semiconductor integrated circuit. (C) 2005 American Institute of Physics.
引用
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页码:1 / 3
页数:3
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