Engineered arrays of nitrogen-vacancy color centers in diamond based on implantation of CN- molecules through nanoapertures

被引：72

作者：

Spinicelli, P. ^{[1
]}

Dreau, A. ^{[1
]}

Rondin, L. ^{[1
]}

Silva, F. ^{[2
]}

Achard, J. ^{[2
]}

Xavier, S. ^{[3
]}

Bansropun, S. ^{[3
]}

Debuisschert, T. ^{[3
]}

Pezzagna, S. ^{[4
]}

Meijer, J. ^{[4
]}

Jacques, V. ^{[1
]}

Roch, J-F ^{[1
]}

机构：

[1] ENS, CNRS, UMR 8537, Lab Photon Quant & Mol, F-94235 Cachan, France

[2] CNRS, UPR 1311, Lab Ingn Mat & Hautes Press, F-93430 Villetaneuse, France

[3] Thales Res & Technol, F-91767 Palaiseau, France

[4] Ruhr Univ Bochum, RUBION, D-44780 Bochum, Germany

来源：

NEW JOURNAL OF PHYSICS | 2011年 / 13卷

关键词：

SINGLE SPINS; FLUORESCENCE; MICROSCOPY; DEFECTS;

D O I：

10.1088/1367-2630/13/2/025014

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We report a versatile method for engineering arrays of nitrogen-vacancy (NV) color centers in diamond at the nanoscale. The defects were produced in parallel by ion implantation through 80 nm diameter apertures patterned using electron beam lithography in a polymethyl methacrylate (PMMA) layer deposited on a diamond surface. The implantation was performed with CN- molecules that increased the NV defect-formation yield. This method could enable the realization of a solid-state coupled-spin array and could be used for positioning an optically active NV center on a photonic microstructure.

引用

页数：7

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