Optical measurement system for characterizing compound semiconductor interface and surface states

被引:12
作者
Passlack, M [1 ]
Legge, RN [1 ]
Convey, D [1 ]
Yu, ZY [1 ]
Abrokwah, JK [1 ]
机构
[1] Motorola Inc, Phoenix Corp Res Labs, Tempe, AZ 85284 USA
关键词
interface phenomena; optical spectroscopy; photoluminescence; semiconductor device modeling; semiconductor-insulator interfaces;
D O I
10.1109/19.746611
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An optical measurement system that is useful for the characterization of interface and surface states on a,vide variety of compound semiconductor material systems has been developed, The PC-based measurement system, using argon ion laser elicitation from 10(-1) to 10(4) W/cm(2) pow er density and a light spot focused to a FWHM of 35 mu m, acquires photoluminescence (PL) spectra from a semiconductor material system over a dynamic intensity range of more than eight orders of magnitude. The measured PL intensities that are evaluated using an er;tended, numerical self-consistent drift-diffusion model provide properties of interface and surface states such as density and capture cross section as well as derived quantities including nonradiative interface and surface recombination velocity.
引用
收藏
页码:1362 / 1366
页数:5
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