Terahertz time-domain spectroscopy of films fabricated from SU-8

被引：68

作者：

Arscott, S

Garet, F

Mounaix, P

Duvillaret, L

Coutaz, JL

Lippens, D

机构：

[1] Univ Sci & Tech Lille Flandres Artois, Inst Elect & Microelect Nord, F-59652 Villeneuve Dascq, France

[2] Univ Savoie, Lab Hyperfrequences & Caracterisat, F-73376 Le Bourget Du Lac, France

来源：

ELECTRONICS LETTERS | 1999年 / 35卷 / 03期

关键词：

D O I：

10.1049/el:19990146

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Terahertz time-domain spectroscopy has been used to characterise the refractive index and absorption coefficient of samples fabricated using the negative photoresist SU-8, in the frequency range 0.1-1.6THz. At a frequency of 1THz, the corresponding dielectric constant and dielectric loss tangent are 2.9 and 6.3 x 10(-6), respectively.

引用

页码：243 / 244

页数：2

共 6 条

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