Influence of carbon sputtering power on structure, corrosion resistance, adhesion strength and wear resistance of platinum/ruthenium/nitrogen doped diamond-like carbon thin films

被引：20

作者：

Khun, N. W. ^{[1
]}

Liu, E. ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore

来源：

SURFACE & COATINGS TECHNOLOGY | 2010年 / 205卷 / 03期

关键词：

DLC thin film; Pt/Ru/N doping; Magnetron sputtering; Corrosion; CATHODIC VACUUM-ARC; AMORPHOUS-CARBON; MECHANICAL-PROPERTIES; HEAVY-METALS; GAS-MIXTURE; DLC FILMS; NITROGEN; DEPOSITION; COATINGS; BEHAVIOR;

D O I：

10.1016/j.surfcoat.2010.08.023

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Platinum/ruthenium/nitrogen doped diamond-like carbon (PtRuN-DLC) thin films were deposited on conductive p-Si substrates using a DC magnetron sputtering deposition system by varying carbon sputtering power. The chemical composition, bonding structure, surface morphology and adhesion strength of the PtRuN-DLC films were investigated using X-ray photoelectron spectroscopy (XPS), micro-Raman spectroscopy, atomic force microscopy (AFM), and micro-scratch test, respectively. The corrosion behavior of the PtRuN-DLC films in a 0.1 M NaCl solution was investigated using potentiodynamic polarization test. The corrosion results indicated that the corrosion resistance of the PtRuN-DLC films increased with increased carbon sputtering power probably due to decreased porosity level in the films with increased growth rate and film thickness. The wear performance of the PtRuN-DLC films was investigated with a ball-on-disc micro-tribometer. It was found that the increased carbon sputtering power significantly improved the wear performance of the films by enhancing the adhesion strength of the films. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：853 / 860

页数：8

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