Ordering cylindrical microdomains for binary blends of block copolymers with graphoepitaxy

被引：15

作者：

Chen, Feng ^{[1
]}

Akasaka, Satoshi ^{[1
]}

Inoue, Tornohiro ^{[1
]}

Takenaka, Mikihito ^{[1
]}

Hasegawa, Hirokazu ^{[1
]}

Yoshida, Hiroshi ^{[1
]}

机构：

[1] Kyoto Univ, Grad Sch Engn, Dept Polymer Chem, Kyoto 6158510, Japan

来源：

MACROMOLECULAR RAPID COMMUNICATIONS | 2007年 / 28卷 / 22期

关键词：

D O I：

10.1002/marc.200700486

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

The morphology of a thin film was studied for a binary mixture of asymmetric PS-b-PMMA block coplymers on a flat silicon wafer coated with 50 nm thick silicon oxide. AFM and TEM reveal that the PMMA cylinders orient perpendicular to the substrate by tuning thr film thickness. Futhermost, grating substrate with different width and depth are used to guide the alignment of the perpendicular cylinders. As a result, an array of highly ordered, hexagonally pasked PMMA cylinders in the PS matrix with a domain spacing of less than 25 nm has been produced.

引用

页码：2137 / 2144

页数：8

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