Independent tuning of linear and nonlinear stiffness coefficients

被引：78

作者：

Adams, SG ^{[1
]}

Bertsch, FM

Shaw, KA

MacDonald, NC

机构：

[1] TMS Technol Inc, Ithaca, NY 14850 USA

[2] Cornell Univ, Ithaca, NY 14850 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1998年 / 7卷 / 02期

基金：

美国国家科学基金会;

关键词：

actuators; capacitance; electrostatic; stiffness; tuning;

D O I：

10.1109/84.679344

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using a combination of electrostatic actuators, we present a method to independently tune the linear and nonlinear stiffness Coefficients of a uniaxial micromechanical device. To demonstrate the method's capability, we investigated the tuning of an oscillator with linear and cubic restoring forces. We successfully tuned the cubic stiffness from 0.31x10(11) to -5.1x10(11) N/m(3) without affecting the resonant frequency or the linear stiffness. Numerical results are presented which characterize the actuators and indicate important design parameters. Finally, issues such as actuator design, quadratic stiffness, and stability are discussed.

引用

页码：172 / 180

页数：9