Acceleration sensor based on high-Q optical microsphere resonator and pedestal antiresonant reflecting waveguide coupler

被引：87

作者：

Laine, JP

Tapalian, C

Little, B

Haus, H

机构：

[1] MIT, Elect Res Lab, Cambridge, MA 02139 USA

[2] Charles Stark Draper Lab, Cambridge, MA 02139 USA

[3] Univ Maryland, Phys Sci Lab, College Pk, MD 20742 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 93卷 / 01期

关键词：

optical sensor; optical resonator; whispering-gallery mode; high-Q;

D O I：

10.1016/S0924-4247(01)00636-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel acceleration sensing concept utilizing high-Q microsphere whispering-gallery mode resonators is presented. Induced flexure-arm displacements are monitored through changes in the resonance characteristics of a spherical optical cavity coupled to the flexure. Instantaneous measurement sensitivity of better than 1 mg at 250 Hz bandwidth, and a noise floor of 100 mug are demonstrated. (C) 2001 Elsevier Science B.V. All rights reserved.

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页码：1 / 7

页数：7

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