Evaluation of raw hardness of DLC thin films prepared by IBAD

被引：9

作者：

Funada, Y

Awazu, K

Yasui, H

Sugita, T

机构：

[1] Ind Res Inst Ishikawa, Kanazawa, Ishikawa 9200223, Japan

[2] Kanazawa Univ, Kanazawa, Ishikawa 9200942, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1999年 / 148卷 / 1-4期

关键词：

indentation; hardness; IBAD; DLC;

D O I：

10.1016/S0168-583X(98)00789-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this study. diamond-like carbon (DLC) films were prepared by ion beam assisted deposition (IBAD), and micro-indentation tests were performed to evaluate the raw hardness that was independent of both the film thickness and the substrate hardness. As a result, the hardness constant proportional to the square root of the product of the Vickers hardness and elastic modulus was defined by analyzing the loading curves. Then, the raw hardness of the DLC films on tungsten carbide (WC) or high-speed steel (HSS) was evaluated by using the hardness constant. The effects of ion species in IBAD and the substrates with the different hardness were discussed. It was concluded that the evaluation by using the hardness constant proposed in the present study was useful for determination of the raw hardness of DLC films prepared by IBAD. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：664 / 668

页数：5

共 7 条

[1] Formation of carbon-based superhard materials by condensation of evaporated carbon under rare gas or nitrogen ion irradiation [J].