Simple and reusable fibre-to-chip interconnect with adjustable coupling efficiency

被引:11
作者
Heideman, RG
Lambeck, PV
机构
来源
MICRO-OPTICAL TECHNOLOGIES FOR MEASUREMENT, SENSORS, AND MICROSYSTEMS II AND OPTICAL FIBER SENSOR TECHNOLOGIES AND APPLICATIONS | 1997年 / 3099卷
关键词
fibre-to-chip interconnect; loose-mode waveguide; silicon V-groove; adjustable; reusable; integrated optical;
D O I
10.1117/12.281233
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A simple, efficient and reusable fibre-to-chip interconnect is presented. The interconnect is based on a V-groove (wet-chemically etched) in silicon, combined with a loose-mode Si3N4-channel waveguide. The loose-mode waveguide is adiabatically tapered to the integrated optical (sensor) circuitry. This adiabatic taper enables the dimensions of both the integrated optical sensor circuitry and the loose-mode waveguide section to be designed indepently. The coupling efficiency of the ''plug-it-in'' interconnect is tunable between zero and the maximum obtainale value by tightening two adjustment screws. Coupling efficiencies up to 60% using TE-polarized light at wavelength of 632.8 Nn have been reproducibly measured.
引用
收藏
页码:238 / 247
页数:10
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