Fabrication and field emission characteristics of highly ordered titanium oxide nanodot arrays

被引：16

作者：

Chen, PL ^{[1
]}

Huang, WJ

Chang, JK

Kuo, CT

Pan, FM

机构：

[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan

[2] Natl Nano Device Lab, Hsinchu, Taiwan

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 2005年 / 8卷 / 10期

关键词：

D O I：

10.1149/1.2030489

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

A field emission triode device has been fabricated using self-organized nanodot arrays as the electron emission source. Uniform nanodot arrays of titanium oxide were prepared from the Al/Ti film stack on silicon substrates by electrochemical anodization. The field emission triodes with titanium oxide nanodot emitters exhibited a low gate turn-on voltage of 45 V and high emission current density of 25 mA/cm(2) at 120 V. The excellent electric properties and easily controllable fabrication process of the nanodot triodes show potential applications for field emission displays and vacuum microelectronics. (c) 2005 The Electrochemical Society.

引用

页码：H83 / H86

页数：4

共 19 条

[1] Field emission from single-wall carbon nanotube films [J].

Bonard, JM ;

Salvetat, JP ;

Stockli, T ;

de Heer, WA ;

Forro, L ;

Chatelain, A .

APPLIED PHYSICS LETTERS, 1998, 73 (07) :918-920

[2] VACUUM MICROELECTRONIC DEVICES [J].

BRODIE, I ;

SCHWOEBEL, PR .

PROCEEDINGS OF THE IEEE, 1994, 82 (07) :1006-1034

[3] Effect of O2 on the electron emission characteristics of active molybdenum field emission cathode arrays [J].

Chalamala, BR ;

Wallace, RM ;

Gnade, BE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (05) :2859-2865

[4] Preparation and phase transformation of highly ordered TiO2 nanodot arrays on sapphire substrates [J].

Chen, PL ;

Kuo, CT ;

Pan, FM ;

Tsai, TG .

APPLIED PHYSICS LETTERS, 2004, 84 (19) :3888-3890

[5] Self-organized titanium oxide nanodot arrays by electrochemical anodization [J].

Chen, PL ;

Kuo, CT ;

Tsai, TG ;

Wu, BW ;

Hsu, CC ;

Pan, FM .

APPLIED PHYSICS LETTERS, 2003, 82 (17) :2796-2798

[6] Field emission from vertically aligned conductive IrO2 nanorods [J].

Chen, RS ;

Huang, YS ;

Liang, YM ;

Hsieh, CS ;

Tsai, DS ;

Tiong, KK .

APPLIED PHYSICS LETTERS, 2004, 84 (09) :1552-1554

[7] Integration of thin film transistor controlled carbon nanotubes for field emission devices [J].

Cheng, HC ;

Hong, WK ;

Tarntair, FG ;

Chen, KJ ;

Lin, JB ;

Chen, KH ;

Chen, LC .

ELECTROCHEMICAL AND SOLID STATE LETTERS, 2001, 4 (04) :H5-H7

[8] A CARBON NANOTUBE FIELD-EMISSION ELECTRON SOURCE [J].

DEHEER, WA ;

CHATELAIN, A ;

UGARTE, D .

SCIENCE, 1995, 270 (5239) :1179-1180

[9]

HIRANO T, 1996, JPN J APPL PHYS, V35, P861

[10] INFLUENCES OF GASES ON THE FIELD-EMISSION [J].

ITOH, S ;

NIIYAMA, T ;

YOKOYAMA, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (03) :647-650

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