Elastic surface wave devices based on piezoelectric thick-films

被引:8
作者
DeCicco, G
Morten, B
Prudenziati, M
机构
[1] Department of Physics, University of Modena
关键词
D O I
10.1109/58.484466
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
A study has been performed for the development of elastic-waves structures, involving screen printed and fired piezoelectric layers on nonpiezoelectric substrates, intended for new families of thick film sensors. This study approached the electroacoustic effects, i.e., the coupling between electromechanical. parameters of the layers and elastic properties of the substrate, related to the wave propagation. In this work, particular attention is devoted to devices implemented on alumina substrates where SAW as well as (symmetric and antisymmetric) Lamb's waves are generated. The realization processes and the performance characteristics of these structures are presented.
引用
收藏
页码:73 / 77
页数:5
相关论文
共 8 条
[1]  
BARONE A, 1962, ENCY PHYSICS, V10
[2]  
CORSON D, 1962, INTRO ELECTROMAGNETI
[3]   A THICK-FILM RESONANT SENSOR FOR HUMIDITY MEASUREMENTS [J].
MORTEN, B ;
DECICCO, G ;
PRUDENZIATI, M .
SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :337-342
[4]  
Morten B., 1992, Hybrid Circuits, P25
[5]   A NOVEL TORQUE SENSOR-BASED ON ELASTIC-WAVES GENERATED AND DETECTED BY PIEZOELECTRIC THICK-FILMS [J].
MORTEN, B ;
DECICCO, G ;
PRUDENZIATI, M .
SENSORS AND ACTUATORS A-PHYSICAL, 1994, 41 (1-3) :33-38
[6]  
MORTEN B, 1991, SENSOR ACTUAT A-PHYS, V31, P153
[7]  
UOZUMI K, 1983, APPL PHYS LETT, V40, P917
[8]  
WHITE RM, 1970, P IEEE, V10, P1238