Electron and excited particle densities in a carbon ablation plume

被引：8

作者：

Bratescu, MA ^{[1
]}

Sakai, Y ^{[1
]}

Yamaoka, D ^{[1
]}

Suda, Y ^{[1
]}

Sugawara, H ^{[1
]}

机构：

[1] Hokkaido Univ, Div Elect & Informat Engn, Kita Ku, Sapporo, Hokkaido 0608628, Japan

来源：

APPLIED SURFACE SCIENCE | 2002年 / 197卷

关键词：

carbon ablation; laser absorption spectroscopy; stark broadening effect;

D O I：

10.1016/S0169-4332(02)00379-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In a plume produced by excimer ArF laser, the number densities of excited atoms and electrons, and the expansion velocity of ablated carbon atoms in an Ar gas were measured and compared with those obtained in vacuum. A saturation in C(3(1)P(1)(0)) density was observed as the laser fluence increased. This saturation was shown to be closely related to the electron density saturation. The excitation of Ar(4s'[1/2](1)(0)) and C(3(1)P(1)(0)) was interpreted by electron collisions and was dependent on gas pressure and excimer laser fluence. (C) 2002 Elsevier Science B.V All rights reserved.

引用

页码：257 / 262

页数：6

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