Excimer laser micromachining for rapid fabrication of diffractive optical elements

被引：77

作者：

Behrmann, GP

Duignan, MT

机构：

[1] Potomac Photonics, Inc, Lanham, MD, 20706

来源：

APPLIED OPTICS | 1997年 / 36卷 / 20期

关键词：

diffractive optical elements; excimer lasers; laser ablation; micromachining; direct write;

D O I：

10.1364/AO.36.004666

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate the fabrication of binary, multilevel, and blazed diffractive structures by a fast and flexible direct-write process by using an excimer-laser-based tabletop micromachining workstation with an integrated optical surface profiler. (C) 1997 Optical Society of America.

引用

页码：4666 / 4674

页数：9

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