Study of the interfacial structure and chemistry of CVD κ-Al2O3/TiC multilayer coatings

被引:14
作者
Halvarsson, M [1 ]
Larsson, A
Ruppi, S
机构
[1] Chalmers Univ Technol, Dept Expt Phys, SE-41296 Gothenburg, Sweden
[2] Univ Gothenburg, SE-41296 Gothenburg, Sweden
[3] Seco Tools AB, Res & Dev, SE-73782 Fagersta, Sweden
基金
瑞典研究理事会;
关键词
HREM; CVD; interface; kappa-Al2O3; gamma-Al2O3; eta-Al2O3; TiC; multilayer; reaction zone;
D O I
10.1016/S0968-4328(00)00088-3
中图分类号
TH742 [显微镜];
学科分类号
摘要
This article describes the interfacial regions in CVD grown TiC/kappa -Al2O3 multilayers. A number of microanalytical techniques were used including HREM, EDX and EELS. Occasionally, the first 50 nm of the alumina layers deposited on the intermediate TiC layers grew as a cubic alumina, heavily faulted, containing small amounts of sulphur (S), maybe as a stabiliser. The presence of slightly rounded TiC (111) facets may act as preferred nucleation sites for the cubic Al2O3 phase, with a 'cube on cube' orientation relationship. In this way the nucleation Of kappa -Al2O3 is less favourable. After some tens of nanometres the cubic phase cannot be stabilised any longer and the layer continues to grow as kappa -Al2O3. A number of observations point towards the reaction zone (RZ) being eta- and/or gamma -Al2O3. The diffraction work and the FFT analysis of the HREM images show that the RZ is an fee phase with a = 7.9 Angstrom, which matches with eta- and gamma -Al2O3. The EELS Al fine structure indicate more tetrahedral Al ions than in kappa -Al2O3, as in eta- and gamma -Al2O3. The RZ contains small amounts of S, as has been reported for gamma -Al2O3. Due to the structural similarities between eta- and gamma -Al2O3 it was not possible to determine which of these cubic phases is present in the RZ. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:807 / 815
页数:9
相关论文
共 18 条
  • [1] Berne C, 1999, JAPAN INSTITUTE OF METALS, PROCEEDINGS, VOL 12, (JIMIC-3), PTS 1 AND 2, P1321
  • [2] CHATFIELD C, 1989, J PHYS C SOLID STATE, V5, P377
  • [3] Microstructural investigations of CVD TiN/kappa-Al2O3 multilayer coatings on cemented carbides
    Halvarsson, M
    Vuorinen, S
    [J]. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 1997, 15 (1-3) : 169 - 178
  • [4] MICROSTRUCTURAL INVESTIGATION OF CVD ALPHA-AL2O3/KAPPA-AL2O3 MULTILAYER COATINGS
    HALVARSSON, M
    NORDEN, H
    VUORINEN, S
    [J]. SURFACE & COATINGS TECHNOLOGY, 1993, 61 (1-3) : 177 - 181
  • [5] EELS FINGERPRINT OF AL-COORDINATION IN SILICATES
    HANSEN, PL
    BRYDSON, R
    MCCOMB, DW
    RICHARDSON, I
    [J]. MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1994, 5 (03): : 173 - 182
  • [6] LARSSON A, IN PRESS
  • [7] Levin I, 1998, MIKROCHIM ACTA, P93
  • [8] STUDY OF PHASE TRANSFORMATIONS DURING CALCINATION OF ALUMINUM HYDROXIDES BY SELECTED AREA ELECTRON DIFFRACTION
    LIPPENS, BC
    DEBOER, JH
    [J]. ACTA CRYSTALLOGRAPHICA, 1964, 17 (10): : 1312 - &
  • [9] SPACE-GROUP DETERMINATION AND STRUCTURE MODEL FOR KAPPA-AL2O3 BY CONVERGENT-BEAM ELECTRON-DIFFRACTION (CBED)
    LIU, P
    SKOGSMO, J
    [J]. ACTA CRYSTALLOGRAPHICA SECTION B-STRUCTURAL SCIENCE, 1991, 47 : 425 - 433
  • [10] PREPARATION OF ALUMINA COATINGS BY CHEMICAL VAPOR-DEPOSITION
    LUX, B
    COLOMBIER, C
    ALTENA, H
    STJERNBERG, K
    [J]. THIN SOLID FILMS, 1986, 138 (01) : 49 - 64