The influence of the respective durations of the discharge and the afterglow on the reactivity of a DC pulsed plasma used for iron nitriding

被引:30
作者
Hugon, R [1 ]
Fabry, M [1 ]
Henrion, G [1 ]
机构
[1] UNIV NANCY 1,PHYS MILIEUX IONISES LAB,URA 835 CNRS,F-54506 VANDOEUVRE NANCY,FRANCE
关键词
D O I
10.1088/0022-3727/29/3/037
中图分类号
O59 [应用物理学];
学科分类号
摘要
The optical diagnostics of a DC pulsed plasma used for iron nitriding is carried out for various plasma conditions. The fluorescence of the first negative and the second positive systems of Ng is observed in the time afterglow, in order to obtain some insights into the creation and the loss processes of N-2(+)(B-2 Sigma(u)(+)), N-2(C-3 Pi(u)), N-2(A(3) Sigma(3)(+)) and N-2(X(1) Sigma(g)(+))states. An iron emission line is also observed which is indicative of the sample sputtering. Particular attention is paid to the influence of the gas pressure on the respective durations of the discharge and the afterglow. Analysis of the plasma both during the discharge and during the post-discharge leads to the determination of favourable conditions for the surface treatment. it is also shown that the electron density in the discharge can be deduced from the line intensity decay in the afterglow.
引用
收藏
页码:761 / 768
页数:8
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