Ex-situ investigation of indium segregation in InGaAs/GaAs quantum wells using high-resolution x-ray diffraction

被引:23
作者
Martini, S
Quivy, AA
da Silva, MJ
Lamas, TE
da Silva, ECF
Leite, JR
Abramof, E
机构
[1] Univ Sao Paulo, Inst Fis, LNMS, BR-05315970 Sao Paulo, Brazil
[2] Inst Nacl Pesquisas Espaciais, Lab Assoiado Sensores & Mat, BR-12245970 Sao Jose Dos Campos, SP, Brazil
基金
巴西圣保罗研究基金会;
关键词
D O I
10.1063/1.1621738
中图分类号
O59 [应用物理学];
学科分类号
摘要
Calculations using the dynamical theory of diffraction together with a sample model which considers the segregation of indium atoms were employed to fit the high-resolution x-ray spectra of strained InGaAs/GaAs quantum wells grown by molecular-beam epitaxy. The segregation coefficients obtained from the best fits to the experimental data of samples grown at different temperatures are in excellent agreement with the expected values and confirm that x-ray diffraction is a valuable tool for the investigation of the segregation phenomenon. (C) 2003 American Institute of Physics.
引用
收藏
页码:7050 / 7052
页数:3
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