Multilayer ISFET membranes for microsystems applications

被引：29

作者：

Cane, C

Gotz, A

Merlos, A

Gracia, I

Errachid, A

Losantos, P

LoraTamayo, E

机构：

[1] Ctr. Nac. de Microelectrònica, IMB-CSIC, Campus UAB

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 35卷 / 1-3期

关键词：

multilayer ISFET membranes; microsystem applications;

D O I：

10.1016/S0925-4005(97)80043-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems.

引用

页码：136 / 140

页数：5

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[3]

Cane C., 1991, TRANSDUCERS '91. 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.91CH2817-5), P225, DOI 10.1109/SENSOR.1991.148843

[4]

KO WH, 1983, P S CHEM SENSORS FUK, P496

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