共 11 条
[1]
CRISENZA G, 1990, P INT EL DEV M SAN F, P107
[2]
QUANTITATIVE-ANALYSIS OF BOROPHOSPHOSILICATE GLASS-FILMS ON SILICON USING INFRARED EXTERNAL REFLECTION-ABSORPTION SPECTROSCOPY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1995, 13 (04)
:1959-1966
[4]
VIBRATIONAL-SPECTRA AND THE STRUCTURE OF PURE VITREOUS B2O3
[J].
PHYSICAL REVIEW B,
1980, 22 (08)
:3983-3990
[7]
KERN W, 1985, RCA REV, V46, P117
[9]
PROPERTIES OF BOROPHOSPHOSILICATE GLASS-FILMS DEPOSITED BY DIFFERENT CHEMICAL VAPOR-DEPOSITION TECHNIQUES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (02)
:633-642