EPR and UV-Raman study of BPSG thin films: structure and defects

被引:16
作者
Fanciulli, M [1 ]
Bonera, E
Carollo, E
Zanotti, L
机构
[1] INFM, Lab MDM, Agrate Brianza, MI, Italy
[2] Univ Leeds, Dept Phys, Leeds LS2 9JT, W Yorkshire, England
[3] STMicroelect, I-20041 Agrate Brianza, MI, Italy
关键词
borophosphosilicate; glass films; paramagnetic defects; UV-Raman spectroscopy;
D O I
10.1016/S0167-9317(00)00430-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Borophosphosilicate glass (BPSG) films produced by Sub-Atmospheric Pressure Chemical Vapor Deposition (SACVD) with different B and P concentrations have been investigated by ultra-violet (UV) Raman and electron paramagnetic resonance (EPR) spectroscopies. We observe a correlation between the main feature of the UV-Raman spectra in the as deposited films, the line at 1326(2) cm(-1) attributed to the stretching vibrations of the P=O double bond, and the spin resonance signals attributed to the stable phosphorus-oxygen-hole-center (POHC) created after room temperature X-ray irradiation. The intensity of the P=O line as well as the intensity of the POHC EPR signal depend on the B content. The metastable configuration, POHCm, has been also observed by EPR. The B content does not affect significantly the concentration of this paramagnetic defect. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:65 / 71
页数:7
相关论文
共 11 条
[1]  
CRISENZA G, 1990, P INT EL DEV M SAN F, P107
[2]   QUANTITATIVE-ANALYSIS OF BOROPHOSPHOSILICATE GLASS-FILMS ON SILICON USING INFRARED EXTERNAL REFLECTION-ABSORPTION SPECTROSCOPY [J].
FRANKE, JE ;
ZHANG, LZ ;
NIEMCZYK, TM ;
HAALAND, DM ;
RADIGAN, KJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (04) :1959-1966
[3]   RAMAN-SPECTRA AND STRUCTURE OF PURE VITREOUS P2O5 [J].
GALEENER, FL ;
MIKKELSEN, JC .
SOLID STATE COMMUNICATIONS, 1979, 30 (08) :505-510
[4]   VIBRATIONAL-SPECTRA AND THE STRUCTURE OF PURE VITREOUS B2O3 [J].
GALEENER, FL ;
LUCOVSKY, G ;
MIKKELSEN, JC .
PHYSICAL REVIEW B, 1980, 22 (08) :3983-3990
[5]   DEFECT CENTERS IN A PURE-SILICA-CORE BOROSILICATE-CLAD OPTICAL FIBER - ESR STUDIES [J].
GRISCOM, DL ;
SIGEL, GH ;
GINTHER, RJ .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (03) :960-967
[6]   FUNDAMENTAL DEFECT CENTERS IN GLASS - ELECTRON-SPIN RESONANCE AND OPTICAL-ABSORPTION STUDIES OF IRRADIATED PHOSPHORUS-DOPED SILICA GLASS AND OPTICAL FIBERS [J].
GRISCOM, DL ;
FRIEBELE, EJ ;
LONG, KJ ;
FLEMING, JW .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (07) :3743-3762
[7]  
KERN W, 1985, RCA REV, V46, P117
[8]   UV-irradiation-induced structural transformation in phosphosilicate glass fiber [J].
Plotnichenko, VG ;
Sokolov, VO ;
Koltashev, VV ;
Sulimov, VB ;
Dianov, EM .
OPTICS LETTERS, 1998, 23 (18) :1447-1449
[9]   PROPERTIES OF BOROPHOSPHOSILICATE GLASS-FILMS DEPOSITED BY DIFFERENT CHEMICAL VAPOR-DEPOSITION TECHNIQUES [J].
ROJAS, S ;
GOMARASCA, R ;
ZANOTTI, L ;
BORGHESI, A ;
SASSELLA, A ;
OTTAVIANI, G ;
MORO, L ;
LAZZERI, P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (02) :633-642
[10]   NATURE OF DEFECT CENTERS IN B-DOPED AND P-DOPED SIO2 THIN-FILMS [J].
WARREN, WL ;
SHANEYFELT, MR ;
FLEETWOOD, DM ;
WINOKUR, PS .
APPLIED PHYSICS LETTERS, 1995, 67 (07) :995-997