The high-k solution

被引:301
作者
Bohr, Mark T.
Chau, Robert S.
Ghani, Tahir
Mistry, Kaizad
机构
[1] Intel
关键词
(Edited Abstract);
D O I
10.1109/MSPEC.2007.4337663
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In mid 1990s, Intel and other major chipmakers saw the saturation of capacity in the used of silicon dioxide (SiO2) gate insulator. Search for a replacement material is focused on the ability to concentrate an electric field with less current leak. Such material is called "high-k" dielectric or high strong capacity between two conducting plates. Several dielectric candidates have identified and tried but the results were discouraging. In turn, however, the problem lies not on the material but on the position process. Uneven surfaces leaving some gaps were found in sputtering and chemical vapor depositions where electric charges get stuck. A better deposition is found in a single layer of atoms and was introduced only in 2007. Intel has finally developed their metal gate transistors with hafnium-based material. This development had made to work on 45nm technology of which was an important breakthrough.
引用
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页码:29 / 35
页数:7
相关论文
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[1]  
CHAU RS, 2004, IEEE ELECT DEVIC JUN