Electron-driven processes in high-pressure plasmas

被引:22
作者
Becker, KH [1 ]
Masoud, NM
Martus, KE
Schoenbach, KH
机构
[1] Stevens Inst Technol, Dept Phys & Engn Phys, Hoboken, NJ 07030 USA
[2] Stevens Inst Technol, Ctr Environm Syst, Hoboken, NJ 07030 USA
[3] William Paterson Univ New Jersey, Dept Chem & Phys, Wayne, NJ USA
[4] Old Dominion Univ, Dept Elect & Comp Engn, Norfolk, VA USA
[5] Old Dominion Univ, Ctr Biolelect, Norfolk, VA USA
关键词
D O I
10.1140/epjd/e2005-00199-0
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This review article summarizes results from selected recent studies of collisional and radiative processes initiated and driven by low-energy electron interactions with atoms and molecules in high-pressure plasmas. A special emphasis of the article is on spectroscopic studies of plasmas used as sources for non-coherent vacuum ultraviolet radiation such as rare excimer emissions and atomic and molecular emissions from plasmas in admixtures of rare gases and the molecular gases H-2 and N-2. An attempt is made to correlate the various observed emission features and their dependence on the plasma operating parameters (pressure, power, gas mixture, mode of excitation, etc.) to the underlying microscopic atomic and molecular processes.
引用
收藏
页码:279 / 297
页数:19
相关论文
共 88 条
[11]  
DELCROIX JL, 1976, PRINCIPLES GAS LASER
[12]  
DIETZ D, 2003, B AM PHYS SOC, V48, P64
[13]  
DIETZ D, 2003, 56 GAS EL C SAN FRAN
[14]  
DIETZ D, 2004, 31 IEEE ICOPS BALT M, P413
[15]   Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature [J].
Donnelly, VM ;
Malyshev, MV .
APPLIED PHYSICS LETTERS, 2000, 77 (16) :2467-2469
[16]   VUV emission from a novel DBD-based radiation source [J].
El-Dakrouri, A ;
Yan, J ;
Gupta, MC ;
Laroussi, M ;
Badr, Y .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2002, 35 (21) :L109-L114
[17]   Series operation of direct current xenon chloride excimer sources [J].
El-Habachi, A ;
Shi, WH ;
Moselhy, M ;
Stark, RH ;
Schoenbach, KH .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (06) :3220-3224
[18]   Generation of intense excimer radiation from high-pressure hollow cathode discharges [J].
El-Habachi, A ;
Schoenbach, KH .
APPLIED PHYSICS LETTERS, 1998, 73 (07) :885-887
[19]   Emission of excimer radiation from direct current, high-pressure hollow cathode discharges [J].
El-Habachi, A ;
Schoenbach, KH .
APPLIED PHYSICS LETTERS, 1998, 72 (01) :22-24
[20]   OZONE SYNTHESIS FROM OXYGEN IN DIELECTRIC BARRIER DISCHARGES [J].
ELIASSON, B ;
HIRTH, M ;
KOGELSCHATZ, U .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1987, 20 (11) :1421-1437