Non-contacting holographic surface acoustic wave microscope

被引:5
作者
Clark, M [1 ]
Sharples, SD [1 ]
Somekh, MG [1 ]
Leitch, AS [1 ]
机构
[1] Univ Nottingham, Sch Elect & Elect Engn, Nottingham NG7 2RD, England
关键词
D O I
10.1049/el:19990222
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A noncontacting laser-based surface acoustic wave microscope is described, which overcomes the problem normally associated with non-contacting acoustic microscopy, namely the poor signal to noise ratio. The solution enables the scan rate to be increased dramatically. Details of the optical system and associated electronics are described.
引用
收藏
页码:346 / 347
页数:2
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