Micromachined double backplate differential capacitive microphone

被引：20

作者：

Bay, J

Hansen, O

Bouwstra, S

机构：

[1] Microtron AS, DK-4000 Roskilde, Denmark

[2] Tech Univ Denmark, Ctr Microelect, DK-2800 Lyngby, Denmark

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1999年 / 9卷 / 01期

关键词：

Atmospheric humidity - Contamination - Design - Diaphragms - Electric potential - Mathematical models - Micromachining - Performance - Prevention;

D O I：

10.1088/0960-1317/9/1/003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel design of micromachined capacitive microphone with inherently considerably higher sensitivity than traditional designs is presented in this paper. A process sequence is suggested and means to protect the structure against contamination with dust and humidity are considered. The structure is modelled numerically to calculate the optimum design and to compare with traditional microphone designs.

引用

页码：30 / 33

页数：4

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