Relation between mechanical and structural properties of silicon-incorporated hard a-C:H films

被引:71
作者
Neto, ALB
Santos, RA
Freire, FL
Camargo, SS
Carius, R
Finger, F
Beyer, W
机构
关键词
amorphous materials; carbon; silicon carbide; structural properties;
D O I
10.1016/S0040-6090(96)08948-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Results of the mechanical and structural properties of silicon-incorporated hard hydrogenated amorphous carbon films are reported. A strong reduction of the residual internal stress with an almost constant mechanical hardness was observed and the possible causes of this behavior are investigated, Infrared absorption and elastic recoil hydrogen detection results show that silicon is incorporated replacing carbon atoms in the amorphous network with approximately constant bonded hydrogen density and total hydrogen content. Additionally, Raman experiments indicate that silicon incorporation increases the sp(3) character of the material, while electron spin resonance measurements show a decrease of the number and size of the sp(2) graphitic defects present in the material. Hydrogen effusion experiments indicate that the observed reduction of residual internal stress may be attributed to a less compact material with an increased density of voids in comparison tu pure a-C:H.
引用
收藏
页码:206 / 211
页数:6
相关论文
共 23 条
[1]  
ANGUS JC, 1986, PLASMA DEPOSITED THI
[2]  
BEYER W, 1987, J NONCRYST SOLIDS, V97, P1367
[3]  
BEYER W, 1987, DISORDERED SEMICONDU
[4]   RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].
BUBENZER, A ;
DISCHLER, B ;
BRANDT, G ;
KOIDL, P .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4590-4595
[5]  
DEMICHELIS F, 1991, P 10 EUR PHOT SOL EN, P125
[6]   HARDNESS AND YOUNGS MODULUS OF AMORPHOUS A-SIC THIN-FILMS DETERMINED BY NANOINDENTATION AND BULGE TESTS [J].
ELKHAKANI, MA ;
CHAKER, M ;
JEAN, A ;
BOILY, S ;
KIEFFER, JC ;
OHERN, ME ;
RAVET, MF ;
ROUSSEAUX, F .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (01) :96-103
[7]   INTERNAL-STRESS REDUCTION BY NITROGEN INCORPORATION IN HARD AMORPHOUS-CARBON THIN-FILMS [J].
FRANCESCHINI, DF ;
ACHETE, CA ;
FREIRE, FL .
APPLIED PHYSICS LETTERS, 1992, 60 (26) :3229-3231
[8]   STRUCTURAL MODIFICATIONS IN A-C-H FILMS DOPED AND IMPLANTED WITH NITROGEN [J].
FRANCESCHINI, DF ;
ACHETE, CA ;
FREIRE, FL ;
BEYER, W ;
MARIOTTO, G .
DIAMOND AND RELATED MATERIALS, 1994, 3 (1-2) :88-93
[9]   STRESSES IN DIAMOND-LIKE CARBON-FILMS [J].
GRILL, A ;
PATEL, V .
DIAMOND AND RELATED MATERIALS, 1993, 2 (12) :1519-1524
[10]   GAS EVOLUTION FROM HYDROGENATED AMORPHOUS-CARBON FILMS [J].
JIANG, X ;
BEYER, W ;
REICHELT, K .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (03) :1378-1380