Super-fine ink-jet printing for nanotechnology

被引:27
作者
Murata, K
机构
来源
INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS | 2003年
关键词
D O I
10.1109/ICMENS.2003.1222022
中图分类号
TP18 [人工智能理论];
学科分类号
081104 ; 0812 ; 0835 ; 1405 ;
摘要
We introduce an ultra-fine inkjet system as a powerful toot for nanotechnology research which allows arrangements of dots with a minimum size of less than one micron. Diverse materials such as conductive polymers, fine ceramics, metal particles etc. can be used as ink materials. Using the ultra-fine silver paste, we achieved the direct print of ultra-fine metallic wire of only a few micrometers in width without any pre-patterning treatment on substrate. Furthermore, using the transition-metal nano-particles as catalist-ink, patterned array of carbon nano-tubes were successfully obtained. A field emission from the patterned carbon nano-tubes is also confirmed.
引用
收藏
页码:346 / 349
页数:4
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