New layer structure of phase change optical disk free from the initialization process

被引:2
作者
Ogawa, S [1 ]
Takeguchi, K [1 ]
Morimoto, I [1 ]
机构
[1] Asahi Chem Ind Co Ltd, Cent Res Labs, Fuji, Shizuoka 4168501, Japan
来源
OPTICAL DATA STORAGE '98 | 1998年 / 3401卷
关键词
phase change; initialization-free; crystallization; DVD-RAM; GeSbTe; sputtering;
D O I
10.1117/12.327942
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
In general, phase change media have to be initialized prior to recording, Initialization for phase change optical disks involves crystallization of as-deposited amorphous recording films, An initialization-free technology will lead to a low production cost, which is very important for commercializing phase change optical disks. A crystallization assisted layer (CA layer) was deposited just before the sputtering of a recording layer GeSbTe. The CA layer is to assist to crystallize GeSbTe film during sputtering. We have confirmed by X-ray diffraction method that the recording layer was crystallized just after sputtering. Our proposed disk with CA layer show the similar performance to the 2.6GBytes digital video disk-random access memory (DVD-RAM) disk.
引用
收藏
页码:244 / 251
页数:8
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