The correlation of stress-state and nano-mechanical properties in Au

被引：4

作者：

Jarausch, KF ^{[1
]}

Kiely, JD ^{[1
]}

Houston, JE ^{[1
]}

Russell, PE ^{[1
]}

机构：

[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA

来源：

FUNDAMENTALS OF NANOINDENTATION AND NANOTRIBOLOGY | 1998年 / 522卷

关键词：

D O I：

10.1557/PROC-522-119

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A dependence of elastic response on the stress-state of a thin-film has been demonstrated using the interfacial force microscope (IFM). Indentation response was measured as a function of the applied biaxial stress-state for 100 nm thick Au films. An increase in measured elastic modulus with applied compressive stress, and a decrease with applied tensile stress was observed. Measurements of elastic modulus before and after applying stress were identical indicating that the observed change in response is not due to a permanent change in film properties.

引用

页码：119 / 124

页数：6