A bellows-shape electrostatic microactuator

被引：28

作者：

Minami, K ^{[1
]}

Morishita, H ^{[1
]}

Esashi, M ^{[1
]}

机构：

[1] Tohoku Univ, Fac Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 72卷 / 03期

基金：

日本学术振兴会;

关键词：

electrostatic microactuator; excimer laser ablation; bellows-shape; parylene;

D O I：

10.1016/S0924-4247(98)00213-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The bellows-shape electrostatic microactuator was developed by using a novel fabrication technique which combines excimer laser ablation and polymer/metal film deposition. The actuator consists of similar to 2.5 mu m thick parylene (poly-para-xylelene) polymer bellows and gold electrodes. The actuator is 1.2 mm in diameter and the bellows part is a hollow screw thread the pitch of which is 23 mu m. Parylene and gold electrode are evaporated on the screw-shape polyimide core mold made by excimer laser ablation. At the end of the fabrication, the core mold is removed by wet etching. The actuator is driven by DC voltage and the displacement is 30 mu m(3.4% of the length of the actuator) and the actuation speed exceeded 20 mu m/ms when applied 100 V. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：269 / 276

页数：8

共 5 条

[1]

Bobbio S. M., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P149, DOI 10.1109/MEMSYS.1993.296931

[2]

Minami K., 1993, Journal of Microelectromechanical Systems, V2, P121, DOI 10.1109/84.260256

[3]

OTSU M, 1995, 13 SENS S, P33

[4] LATERALLY DRIVEN POLYSILICON RESONANT MICROSTRUCTURES [J].

TANG, WC ;

NGUYEN, TCH ;

HOWE, RT .

SENSORS AND ACTUATORS, 1989, 20 (1-2) :25-32

[5]

Yamaguchi M., 1993, Journal of Micromechanics and Microengineering, V3, P90, DOI 10.1088/0960-1317/3/2/010

← 1 →