Dynamically figured Kirkpatrick Baez x-ray micro-focusing optics

被引:107
作者
Eng, PJ [1 ]
Newville, M [1 ]
Rivers, ML [1 ]
Sutton, SR [1 ]
机构
[1] Univ Chicago, CARS, Chicago, IL 60637 USA
来源
X-RAY MICROFOCUSING: APPLICATIONS AND TECHNIQUES | 1998年 / 3449卷
关键词
micro-focusing; x-ray mirror; Kirkpatrick-Baez; micro-beam; microprobe; microspectroscopy;
D O I
10.1117/12.330342
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present the optical designs, modeling, bender design and test results of x-ray micro-focusing optics used to micro-focus monochromatic undulator x-rays at the Advanced Photon Source (APS) The system uses two 100mm long, actively bent mirrors in a Kirkpatrick Baez arrangement. A detailed analytical model of the system's performance is described along with ray tracing results. A description of the integration of the benders into a complete micro-focusing system is provided. The system is easy to setup and use and is presently used in earth science research coupled to techniques such as micro-spectroscopy, fluorescence microprobe, and energy dispersive diffraction. The optics' performance is measured on the GeoSoilEnviroCARS microprobe experimental station at APS sector 13. Focusing tests using 10keV undulator x-rays resulted in a double focused beam with a horizontal and vertical full width at half maximum of 0.80 mu m x 0.85 mu m, and flux density gain greater than 10(5).
引用
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页码:145 / 156
页数:12
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