We report the fabrication of sub-micrometer large silicon pillars with controlled aspect ratios by combining thin polymer film structuring and dry etching. A wide library of structures was achieved thanks to the tunability of the process both concerning lateral and vertical dimensions. The structures were further used to create superhydrophobic surfaces. Depending on the aspect ratio of the pillars, different superhydrophobic wetting states were observed. Special attention was also paid to the influence of surface structuring on the contact angle hysteresis. (C) 2009 Elsevier B. V. All rights reserved.
机构:
Coll France, URA 792 CNRS, Phys Mat Condensee Lab, F-75231 Paris 05, FranceColl France, URA 792 CNRS, Phys Mat Condensee Lab, F-75231 Paris 05, France
Bico, J
;
Marzolin, C
论文数: 0引用数: 0
h-index: 0
机构:Coll France, URA 792 CNRS, Phys Mat Condensee Lab, F-75231 Paris 05, France
Marzolin, C
;
Quéré, D
论文数: 0引用数: 0
h-index: 0
机构:Coll France, URA 792 CNRS, Phys Mat Condensee Lab, F-75231 Paris 05, France
机构:
Univ Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USAUniv Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USA
Choi, CH
;
Kim, CJ
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USAUniv Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USA
机构:
Coll France, URA 792 CNRS, Phys Mat Condensee Lab, F-75231 Paris 05, FranceColl France, URA 792 CNRS, Phys Mat Condensee Lab, F-75231 Paris 05, France
Bico, J
;
Marzolin, C
论文数: 0引用数: 0
h-index: 0
机构:Coll France, URA 792 CNRS, Phys Mat Condensee Lab, F-75231 Paris 05, France
Marzolin, C
;
Quéré, D
论文数: 0引用数: 0
h-index: 0
机构:Coll France, URA 792 CNRS, Phys Mat Condensee Lab, F-75231 Paris 05, France
机构:
Univ Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USAUniv Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USA
Choi, CH
;
Kim, CJ
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USAUniv Calif Los Angeles, Dept Aerosp & Mech Engn, Los Angeles, CA 90095 USA