Three-dimensional STEM for observing nanostructures

被引：48

作者：

Koguchi, M ^{[1
]}

Kakibayashi, H

Tsuneta, R

Yamaoka, M

Niino, T

Tanaka, N

Kase, K

Iwaki, M

机构：

[1] Hitachi Ltd, Cent Res Lab, Tokyo 1858604, Japan

[2] Univ Tokyo, Minato Ku, Tokyo 1068558, Japan

[3] Nagoya Univ, Nagoya, Aichi 4648603, Japan

[4] Inst Phys & Chem Res, Wako, Saitama 3510198, Japan

来源：

JOURNAL OF ELECTRON MICROSCOPY | 2001年 / 50卷 / 03期

关键词：

3D-observation; HAADF-STEM; eucentric specimen stage; double spherical fulcra; cylindrical specimen; FIB; ZnO particle; Cu metallization; 3D-EDX;

D O I：

10.1093/jmicro/50.3.235

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode.

引用

页码：235 / 241

页数：7

共 15 条

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