Organic-inorganic materials for integrated optoelectronics

被引：18

作者：

Fardad, MA ^{[1
]}

Fallahi, M ^{[1
]}

机构：

[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA

来源：

ELECTRONICS LETTERS | 1998年 / 34卷 / 20期

关键词：

D O I：

10.1049/el:19981360

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new composition of organic-inorganic photosensitive materials is grown using the sol-gel process. The material, organoaluminosilicate, is spin coated onto Si wafers and channel waveguides are photoinscribed and developed using solvent assisted photolithographic process. The process is simple, reproducible, low cost and low loss.

引用

页码：1940 / 1941

页数：2

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