Piezoresistive friction force sensor for tribological research

被引：2

作者：

Burger, J ^{[1
]}

Berenschot, E ^{[1
]}

Burger, GJ ^{[1
]}

Visscher, H ^{[1
]}

Elwenspoek, M ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1998年 / 8卷 / 02期

关键词：

D O I：

10.1088/0960-1317/8/2/023

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a [100] silicon wafer.

引用

页码：138 / 140

页数：3