Power MEMS - A capacitive vibration-to-electrical energy converter with built-in voltage

被引：46

作者：

Kuehne, Ingo ^{[1
]}

Frey, Alexander ^{[1
]}

Marinkovic, Djordje ^{[1
]}

Eckstein, Gerald ^{[1
]}

Seidel, Helmut ^{[2
]}

机构：

[1] Siemens AG, Corp Technol, D-81739 Munich, Germany

[2] Univ Saarland, Chair Micromech Microfluid Microactuators, D-66041 Saarbrucken, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 142卷 / 01期

关键词：

power MEMS; energy converter; capacitive energy conversion; vibration-to-electrical conversion; built-in voltage;

D O I：

10.1016/j.sna.2007.02.036

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing materials with different work functions for the electrodes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. The shown Micro-Electro-Mechanical System (MEMS) based capacitive energy converter is able to provide an output power of 4.28 mu W at an external vibration with a frequency of 1 kHz and an amplitude of 1.96 m/s(2) (0.2 g). A basic electronic circuit for storing the electrical energy is also introduced. Furthermore, a MEMS design and a process flow are presented. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：263 / 269

页数：7

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