An improved process for manufacturing diffractive optical elements (DOES) for off-axis illumination systems - art. no. 69242O

被引:8
作者
Leonard, Jerry [1 ]
Carriere, James [1 ]
Stack, Jared [1 ]
Jones, Rich [1 ]
Himel, Marc [1 ]
Childers, John [1 ]
Welch, Kevin [1 ]
机构
[1] Tessera N Amer, Charlotte, NC 28262 USA
来源
OPTICAL MICROLITHOGRAPHY XXI, PTS 1-3 | 2008年 / 6924卷
关键词
DOE; diffractive optical element; diffuser; off-axis illumination;
D O I
10.1117/12.774666
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present advancements in the manufacture of high-performance diffractive optical elements (DOES) used in stepper/scanner off-axis illumination systems. These advancements have been made by employing high resolution lithographic techniques, in combination with precision glass-etching capabilities. Enhanced performance of DOE designs is demonstrated, including higher efficiency with improved uniformity for multi-pole illumination at the pupil plane, while maintaining low on-axis intensity. Theoretical predictions of the performance for several classes of DOE designs will be presented and compared with experimental results. This new process capability results in improved performance of current DOE designs; and enables greater customization including control of the output spatial intensity distribution for future designs. These advancements will facilitate continuous improvements in off-axis illumination optimization required by the end user to obtain larger effective lithographic process windows.
引用
收藏
页码:O9242 / O9242
页数:11
相关论文
共 2 条
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