Determination of Zr and Ti in 3-mu m-thick ZrTiN ceramic coating using laser ablation inductively coupled plasma atomic emission spectrometry

Analysis of 3-mu m-thick ZrN, TIN, and ZrTiN ceramic coatings on a high-speed steel substrate by laser ablation inductively coupled plasma atomic emission spectrometry (LA-ICP-AES) is described, A Nd:YAG laser was used in the Q-switched mode and operated at 355 nm and 5 mJ, Ablation patterns were obtained on the target surface by moving the ablation chamber with respect to the laser beam by means of an X-Y translator, Control of the depth of penetration was obtained by successively performing a limited number of cycles. Transient signals were obtained and their peak areas were used for the construction of calibration graphs based on the concentrations determined by energy-dispersive X-ray (EDX) analysis, An erosion rate of 0.1 mu m per cycle was observed, Crater shape and depth, temporal behavior, and reproducibility of the signals are described.