Encapsulation of organic solar cells with ultrathin barrier layers deposited by ozone-based atomic layer deposition

被引:66
作者
Sarkar, Smita [1 ]
Culp, Jason H. [1 ]
Whyland, Jon T. [1 ]
Garvan, Margret [1 ]
Misra, Veena [1 ]
机构
[1] N Carolina State Univ, Dept Elect & Comp Engn, Raleigh, NC 27695 USA
关键词
Organic solar cell; Encapsulation; Atomic layer deposition; Ozone; POLYMER; AL2O3; FILM;
D O I
10.1016/j.orgel.2010.08.020
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultrathin Al2O3 layers, deposited using atomic layer deposition (ALD), have been utilized as the primary barrier layers for encapsulation of organic solar cells. This work shows that the encapsulation characteristics of a barrier layer can be accentuated by replacing H2O with O-3 as the ALD oxidant. The Al2O3 layers deposited using O-3 offered superior device encapsulation compared to the films deposited using H2O. The organic solar cell efficiency has also been studied as a function of Al2O3 thickness and effective encapsulation has been monitored for two different ALD temperatures. (C) 2010 Elsevier B. V. All rights reserved.
引用
收藏
页码:1896 / 1900
页数:5
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