A self-resonant frequency-modulated micromachined passive pressure transensor

被引：67

作者：

Baldi, A

Choi, W

Ziaie, B

机构：

[1] Univ Minnesota, Dept Elect Engn & Comp Sci, Minneapolis, MN 55455 USA

[2] Univ Minnesota, Dept Biomed Engn, Minneapolis, MN 55455 USA

来源：

IEEE SENSORS JOURNAL | 2003年 / 3卷 / 06期

关键词：

integrated coil; microelectromechanical systems (MEMS); micromachining; pressure sensor; transponder;

D O I：

10.1109/JSEN.2003.820362

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we report on the design, fabrication, and test of a passive pressure transensor. The sensor uses the self-resonant frequency modulation of an integrated coil to detect the pressure variations. This modulation is generated by the relative displacement of a ferrite core attached to a silicone rubber membrane. This scheme simplifies the packaging of the passive transensor by removing the requirement for a separate capacitor to form the resonator. A 30-turn 1.7-MH coil having dimensions of 3 x 3 mm(2) is used in a prototype design yielding a sensitivity of 9.6 kHz/kPa with a cylindrical ferrite core of 0.95-mm diameter and 0.5-mm height. We also present a theoretical model of the sensor that shows good agreement with the experimental data. This model can be a useful tool for further optimization of the senors.

引用

页码：728 / 733

页数：6

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