共 33 条
Holographic Fabrication of Microstructures with Internal Nanopatterns Using Microprism Arrays
被引:19
作者:

Lee, Seung-Kon
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Korea Adv Inst Sci & Technol, Natl Creat Res Initiat Ctr Integrated Optofluid, Taejon 305701, South Korea
Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, Taejon 305701, South Korea Korea Adv Inst Sci & Technol, Natl Creat Res Initiat Ctr Integrated Optofluid, Taejon 305701, South Korea

Park, Hyo Sung
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Korea Adv Inst Sci & Technol, Natl Creat Res Initiat Ctr Integrated Optofluid, Taejon 305701, South Korea
Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, Taejon 305701, South Korea Korea Adv Inst Sci & Technol, Natl Creat Res Initiat Ctr Integrated Optofluid, Taejon 305701, South Korea

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Yang, Seung-Man
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Korea Adv Inst Sci & Technol, Natl Creat Res Initiat Ctr Integrated Optofluid, Taejon 305701, South Korea
Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, Taejon 305701, South Korea Korea Adv Inst Sci & Technol, Natl Creat Res Initiat Ctr Integrated Optofluid, Taejon 305701, South Korea
机构:
[1] Korea Adv Inst Sci & Technol, Natl Creat Res Initiat Ctr Integrated Optofluid, Taejon 305701, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, Taejon 305701, South Korea
[3] Korea Basic Sci Inst, Taejon 305333, South Korea
[4] Sogang Univ, Dept Chem & Biomol Engn, Seoul 121742, South Korea
关键词:
fluorescence;
laser chemistry;
lithography;
macroporous materials;
microarrays;
3-DIMENSIONAL NANOSTRUCTURES;
PHASE MASKS;
INTERFERENCE LITHOGRAPHY;
PHOTONIC NANOSTRUCTURES;
STEP;
NANOFABRICATION;
EXPOSURES;
STAMPS;
D O I:
10.1002/anie.200901166
中图分类号:
O6 [化学];
学科分类号:
0703 ;
摘要:
Through the looking glass: Holographic lithography through a microprism array enables the production of microstructured arrays with 3D internal nanoscale features (see picture). In a single-step exposure of 0.1 s, thousands of features are generated in a spot size of about 1 cm2. They exhibit 14-times enhanced fluorescence compared with conventional microarrays. © 2009 Wiley-VCH Verlag GmbH & Co. KGaA.
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页码:7000 / 7005
页数:6
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