Holographic Fabrication of Microstructures with Internal Nanopatterns Using Microprism Arrays

被引:19
作者
Lee, Seung-Kon [1 ,2 ]
Park, Hyo Sung [1 ,2 ]
Yi, Gi-Ra [3 ]
Moon, Jun Hyuk [4 ]
Yang, Seung-Man [1 ,2 ]
机构
[1] Korea Adv Inst Sci & Technol, Natl Creat Res Initiat Ctr Integrated Optofluid, Taejon 305701, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, Taejon 305701, South Korea
[3] Korea Basic Sci Inst, Taejon 305333, South Korea
[4] Sogang Univ, Dept Chem & Biomol Engn, Seoul 121742, South Korea
关键词
fluorescence; laser chemistry; lithography; macroporous materials; microarrays; 3-DIMENSIONAL NANOSTRUCTURES; PHASE MASKS; INTERFERENCE LITHOGRAPHY; PHOTONIC NANOSTRUCTURES; STEP; NANOFABRICATION; EXPOSURES; STAMPS;
D O I
10.1002/anie.200901166
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Through the looking glass: Holographic lithography through a microprism array enables the production of microstructured arrays with 3D internal nanoscale features (see picture). In a single-step exposure of 0.1 s, thousands of features are generated in a spot size of about 1 cm2. They exhibit 14-times enhanced fluorescence compared with conventional microarrays. © 2009 Wiley-VCH Verlag GmbH & Co. KGaA.
引用
收藏
页码:7000 / 7005
页数:6
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