The preparation of transparent electrically conducting indium oxide films by reactive vacuum evaporation

被引：107

作者：

Gopchandran, KG ^{[1
]}

Joseph, B ^{[1
]}

Abraham, JT ^{[1
]}

Koshy, P ^{[1
]}

Vaidyan, VK ^{[1
]}

机构：

[1] UNIV KERALA,DEPT PHYS,TRIVANDRUM 695581,KERALA,INDIA

来源：

VACUUM | 1997年 / 48卷 / 06期

关键词：

D O I：

10.1016/S0042-207X(97)00023-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium oxide thin films deposited by reactive thermal evaporation of indium in an oxygen atmosphere at different substrate temperatures and oxygen partial pressures are characterized by X-ray diffraction, scanning electron microscopy, optical transmission and electrical resistivity. Preparation conditions are optimized to obtain highly transparent and conducting In2O3 films. (C) 1997 Elsevier Science Ltd. All rights reserved.

引用

页码：547 / 550

页数：4

共 16 条

[1] XRD AND SEM STUDIES OF REACTIVELY DEPOSITED TIN OXIDE THIN-FILMS [J].

ABRAHAM, JT ;

KOSHY, P ;

VAIDYAN, VK ;

MUKHERJEE, PS ;

GURUSWAMY, P ;

KUMARI, LP .

BULLETIN OF MATERIALS SCIENCE, 1995, 18 (05) :557-562

[2] TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].

CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

THIN SOLID FILMS, 1983, 102 (01) :1-46

[3]

DAWAR AL, 1984, J MATER SCI, V19, P1, DOI 10.1007/BF02403106

[4]

GESSERT TA, 1990, J VAC SCI TECHNOL A, P1912

[5] EVAPORATED SN-DOPED IN2O3 FILMS - BASIC OPTICAL-PROPERTIES AND APPLICATIONS TO ENERGY-EFFICIENT WINDOWS [J].

HAMBERG, I ;

GRANQVIST, CG .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (11) :R123-R159

[6]

HOLLAND L, VACUUM DEPOSITION TH, P492

[7] DEPOSITION OF BORON DOPED ZINC-OXIDE FILMS AND THEIR ELECTRICAL AND OPTICAL-PROPERTIES [J].

HU, JH ;

GORDON, RG .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (07) :2014-2022

[8] PREPARATION AND PHYSICAL-PROPERTIES OF TRANSPARENT CONDUCTING OXIDE-FILMS [J].

JARZEBSKI, ZM .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1982, 71 (01) :13-41

[9] ELECTROPHYSICAL PROPERTIES OF INDIUM OXIDE PYROLYTIC FILMS WITH DISORDERED STRUCTURE [J].

KORZO, VF ;

CHERNYAEV, VN .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1973, 20 (02) :695-705

[10]

KOSHY P, 1995, J MATER SCI LETT, V14, P440

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