Polarization of out-of-plane scattering from microrough silicon

被引：43

作者：

Germer, TA ^{[1
]}

Asmail, CC ^{[1
]}

Scheer, BW ^{[1
]}

机构：

[1] VLSI STAND INC,SAN JOSE,CA 95134

来源：

OPTICS LETTERS | 1997年 / 22卷 / 17期

关键词：

D O I：

10.1364/OL.22.001284

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The polarization of light scattered by silicon with a small degree of microroughness was measured out of the plane of incidence. First-order vector perturbation theory for scattering from a rough surface predicts the behavior well. The data and the theory show Brewster-like angles where p --> p scattering from surface microroughness vanishes, as well as a deterministic polarization in other directions.

引用

页码：1284 / 1286

页数：3

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