Stresses in multilayered thin films

被引：27

作者：

Cammarata, RC

Bilello, JC

Greer, AL

Sieradzki, K

Yalisove, SM

机构：

来源：

MRS BULLETIN | 1999年 / 24卷 / 02期

关键词：

D O I：

10.1557/S0883769400051526

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：34 / 38

页数：5

共 62 条

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